InfraScope™ Temperature Mapping Microscope

Accurate, calibrated thermal data for semiconductor reliability, packaging, and failure analysis. InfraScope™ delivers true 2D temperature maps — not raw infrared images — so your team can make confident decisions based on real temperature measurements.

True Temperature Map
True Temperature Map

True Temperature Mapping You Can Trust

Most of the visible contrast in an unprocessed infrared image is not caused by temperature differences, but by variations in emissivity — a material property that determines how efficiently a surface emits infrared radiation. These emissivity differences can obscure true thermal behavior and lead to misleading conclusions if left uncorrected.

InfraScope™ overcomes this challenge through our patented temperature-mapping software, which performs automated, pixel-by-pixel emissivity measurement and correction. This process transforms raw infrared data into an accurate, calibrated temperature map with high spatial and temperature resolution — quickly and automatically.

What you see is real temperature — calibrated for accuracy and reliability.

How Emissivity Correction Works

The four images below walk through our emissivity correction process — from raw infrared capture to a fully calibrated temperature map.

Radiance Image on Unbiased and Unpowered Device

Raw Infrared Image — Before Correction

Most of the contrast in an unprocessed infrared image is caused by emissivity differences between materials — not by temperature. Without correction, these variations can lead to inaccurate thermal conclusions.

Device Emissivity Correction Map

Building the Emissivity Correction Map

Using patented algorithms, InfraScope™ software calculates a pixel-by-pixel emissivity correction map for the device. Multiple correction methods are available to suit different sample types and requirements.

Unbiased Device Post Emissivity Correction

Verifying the Emissivity Correction

After emissivity correction is applied, an image of the unbiased device at any temperature shows a uniform temperature map — confirming accuracy before measurement begins.

rue Temperature Map After Emissivity Correction

The Final Calibrated Temperature Map

With correction complete, InfraScope™ captures an accurate, calibrated temperature map of the device under test. Temperature at any point is read directly from the map by color or cursor position.

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Advanced Software for Dynamic Thermal Analysis

InfraScope™ supports both static and time-dependent thermal analysis through its movie (time-resolved) mode, enabling engineers to capture and analyze temperature changes as they occur. This capability is especially valuable for investigating transient events, validating thermal design rules, and identifying localized reliability risks during active device operation.

InfraScope™ has been widely used across semiconductor disciplines including design, packaging, reliability engineering, MEMS, RF, and microwave applications — anywhere accurate thermal insight is essential.

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Flexible Frontside and Backside Inspection

InfraScope™ supports both front-side and back-side inspection, allowing engineers to probe thermal behavior deep within device structures. Because InfraScope™ operates at infrared wavelengths, its custom microscope objectives are fabricated from infrared-transmissive materials such as silicon, germanium, sapphire, and zinc selenide — ensuring optimal image quality and measurement accuracy.

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Proven on Advanced Semiconductor Samples

InfraScope™ has been successfully applied to advanced multi-metal copper semiconductor processes. The backside images shown here at 5× magnification were obtained from a research sample provided by Philips Research, Eindhoven, through the courtesy of Martijn Goossens and Victor Zieren.

The sample was decapsulated on both sides and featured a six-metal-layer copper process fabricated on a 10 Ω·cm p/p⁺-epitaxial silicon substrate, thinned to 102 μm. These measurements demonstrate InfraScope™’s capability to deliver accurate, meaningful thermal data even in complex, real-world device structures.

Expand Your InfraScope™ Capabilities

InfraScope™ is part of our broader temperature measurement microscopy platform. Depending on your application, you may also want to explore:

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Get More Information About InfraScope™

Whether you’re evaluating InfraScope™ for your lab, comparing configurations, or ready to discuss pricing, our team is here to help.